发明名称 INTEGRATED CIRCUIT, RADIO FREQUENCY TECHNOLOGY STRUCTURE FOR TESTING WAFER AND METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a device including a testing circuit formed on a wafer to perform a radio test of a wafer having an integrated circuit and a method. <P>SOLUTION: A device comprises a testing unit 12 disposed outside of a wafer 16 and at least one testing circuit 14 formed on the wafer including an integrated circuit. The testing unit 12 transmits an RF signal and supply electric power to the testing circuit 14. The testing circuit 14 includes a variable ring oscillator, performs a series of parameter tests at a nominal operation frequency of the integrated circuit, and transmitting a test result to the testing unit 12 for analysis. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012023382(A) 申请公布日期 2012.02.02
申请号 JP20110184674 申请日期 2011.08.26
申请人 SCANIMETRICS INC 发明人 BRIAN MOORE
分类号 H01L21/66;H01L21/822;H01L27/04 主分类号 H01L21/66
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