| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a device for detection of the surface state of a workpiece which can be applied to a wider range of objects to be measured and with which the in-process detection of the amount of changed surface roughness can be performed. <P>SOLUTION: A measurement thermocouple 202 is made to relatively move with a measurement surface of a workpiece 203 while in contact with the surface so as to yield thermoelectromotive force. An amount of changed thermoelectromotive force is measured. The amount of changed thermoelectromotive force is used to determine the amount of changed surface roughness of the measurement surface in the following manner: a data sampling thermocouple identical to the measurement thermocouple 202 is made to relatively move with a reference surface whose surface roughness is known while in contact with the surface under the same contact condition and the same relative movement condition to the measurement surface. On the basis of correlation data ΔE=βRy between the pre-obtained changed amount of the thermoelectromotive force and the amount of changed surface roughness of the reference surface, the amount of changed surface roughness of the measurement surface is obtained (ΔE means the amount of changed thermoelectromotive force from the beginning of the relative movement to the moment of measurement, β means the roughness coefficient derived from the relationship between the thermoelectromotive force and the surface roughness in accordance with the contact condition and the relative movement condition of the thermocouple, and Ry means the surface roughness). <P>COPYRIGHT: (C)2012,JPO&INPIT |
