| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic heater in which the slackness or slipping-off of a ceramic heating body is hard to occur even at high temperature, and having high reliability. <P>SOLUTION: A ceramic heater 1 is equipped with a ceramic heating body 10 heating by energization, and heating body installing means 3 placing a heating portion at a tip end of the ceramic heating body 10 in an installed portion 60. The ceramic heater 1 comprises a heating body joining means 20 joining the ceramic heating body 10 and the heating body holding member 31 at a position on a base end side rather than a stress generating area AR<SB POS="POST">STR</SB>in which stress is generated when an installing means side screw portion 302 provided on a heating body installing member 30 constituting the heating body installing means 3, an installing means side seal portion 314 provided on a heating body holding member 31 constituting the heating body installing means 3 by screwing with a installed side screw portion 611 provided on an installed portion 60, and an installed portion side tapered portion 612 provided on the installed portion 60 are made to abut on each other. <P>COPYRIGHT: (C)2012,JPO&INPIT |
