| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a bending vibration piece which suppresses the loss of vibration displacement energy for vibrating vibration arms and maintains stable vibration characteristics. <P>SOLUTION: A crystal vibration piece 1 serving as a bending vibration piece includes a base 2, vibration arms 3 formed so as to extend from the base 2, and a laminate structure 9. The laminate structure 9 includes an excitation electrode 12 serving as a first electrode, an excitation electrode 22 serving as a second electrode, and a piezoelectric layer 6 disposed between the excitation electrode 12 and the excitation electrode 22. The laminate structure 9 is formed at least in the vibration arm 3, and the piezoelectric layer 6 has a slope 4 at an end part positioned on the base 2 side. <P>COPYRIGHT: (C)2012,JPO&INPIT |
