MANUFACTURING DEVICE FOR NANOIMPRINT MOLD AND MANUFACTURING METHOD FOR NANOIMPRINT MOLD

摘要

Disclosed is a manufacturing device for a nanoimprint mold, wherein said device anodises an aluminium substrate with electrolytic solution, and which is characterised in that at least the material on the surface of a portion which comes into contact with the electrolytic solution is a metal or an alloy thereof having an elution amount of not more than 0.2ppm/cm2 per unit surface of metal when immersed for 450 hours at room temperature in 80mL of electrolytic solution. Also disclosed is a manufacturing method for a nanoimprint mold, said method using the manufacturing device for a nanoimprint mold and carrying out anodising. The disclosed manufacturing method for a nanoimprint mold and disclosed manufacturing device for a nanoimprint mold enable the elution of metal to an electrolytic solution when anodising is carried out to be suppressed.