| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing apparatus and a substrate transfer method whereby the stand-by time of a transfer robot can be shortened, and enlargement of the apparatus is suppressed or prevented. <P>SOLUTION: An indexer robot IR1 carries substrates W one by one to two upper side substrate holding parts 27 among three substrate holding parts 27 arranged in a vertical direction D1. After that, the three substrate holding parts 27 rotate around a rotation axis L1 by 180 degrees. Thereby, the two upper side substrate holding parts 27 to which the substrates W have been carried move to the lower side. A main transfer robot TR1 carries out the substrates W from the upper side substrate holding part 27 among the two upper side substrate holding parts 27 which have moved to the lower side. After that, the indexer robot IR1 again carries the substrates W one by one to the two upper side substrate holding parts 27. <P>COPYRIGHT: (C)2012,JPO&INPIT |
