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发明名称
摘要
申请公布号	JP4868667(B2)	申请公布日期	2012.02.01
申请号	JP20010217463	申请日期	2001.07.18
申请人		发明人
分类号	G02F1/13;H01L21/304;B08B3/02;B08B3/12;C03C23/00;G02F1/1333	主分类号	G02F1/13
代理机构		代理人
主权项
地址

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