| 摘要 |
PURPOSE: An apparatus and method for testing the needle of a probe card are provided to easily database needle check results as well as enhancing the accuracy of inspection. CONSTITUTION: An apparatus for testing the needle of a probe card comprises a controller(110), a camera unit(120), a storing unit(140), and a pattern comparison unit(170). The storing unit stores standard pattern information about the end portion of the needle which is arranged in manufacturing a probe card. A camera takes a photograph of at least the end portions of two neighboring needles and obtains topology data abut the end portion of the needle. The pattern comparison unit compares the standard pattern corresponding to the standard pattern information with the pattern of the end portion of the needle obtained in the camera. The controller stores abnormality information about each needle, which is included in the probe card according to the comparison result of the pattern comparison unit, in the storing unit. |
