发明名称 |
METHOD OF PARTICLE CONTAMINANT REMOVAL |
摘要 |
<p>Apparatus and methods for removing particle contaminants from a solid surface includes providing a layer of a viscoelastic material on the solid surface. The viscoelastic material is applied as a thin film and exhibits substantial liquid-like characteristics. The viscoelastic material at least partially binds with the particle contaminants. A high velocity liquid is applied to the viscoelastic material, such that the viscoelastic material exhibits solid-like behavior. The viscoelastic material is thus dislodged from the solid surface along with the particle contaminants, thereby cleaning the solid surface of the particle contaminants.</p> |
申请公布号 |
SG176793(A1) |
申请公布日期 |
2012.01.30 |
申请号 |
SG20110091675 |
申请日期 |
2010.05.28 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
KAWAGUCHI, MARK;MUI, DAVID;WILCOXSON, MARK |
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