PRESS MECHANISM AND BONDING APPARATUS

摘要

PURPOSE: A press mechanism and a welding device is provided to prevent a deviation of a quality of the composite substrate plate because a vacuum degree of plural vacuum chambers is uniformed and a deaeration state is stabilized. CONSTITUTION: A press tool(10) comprises a shank unit(12), a press plate unit(16), and a supporting unit(14). A designated load is allowed to the shank unit by a pressurizing unit. The press plate unit comprises heating means. The supporting unit fixed to the shank unit transfers loads allowed to the shank unit as a pressing force. The supporting unit and the press plate are not fixed. The leading end part touching to the press plate is a free end.