| 摘要 |
An X-ray tube comprises an electron gun (40) for producing an electron beam (60), a target (72) and a target holder (74), which consists of a holder material which has a lower atomic number than the target material. The target (72) has a width of less than 250 µm, preferably of less than 50 µm, at least in one direction perpendicular to the direction of incidence. The X-ray tube further comprises a focal support detector (86, 87, 88, 90, 92, 99) in order to measure the location of the focal support. The focal support detector has, for this purpose, a detector device (86, 87, 88, 90, 92, 99) for detecting X-ray radiation and/or secondary electrons and/or backscatter electrons, which are emitted when the electron beam impinges on the target (72) and/or the target holder (74). A control unit (91) is designed to drive the deflecting device (66) depending on the location of the focal support in such a way that the electron beam (60) impinges on the target (72). The electron beam (60) is in this case first guided in the manner of a scanner over the target (72) and the target holder (74), as a result of which a scanning electron microscope image of the target (72) is produced. |
