发明名称 Sodium sputtering doping method for large scale CIGS based thin film photovoltaic materials
摘要 A method of processing sodium doping for thin-film photovoltaic material includes forming a metallic electrode on a substrate. A sputter deposition using a first target device comprising 4-12 wt% Na 2 SeO 3 and 88-96 wt% copper-gallium species is used to form a first precursor with a first Cu/Ga composition ratio. A second precursor over the first precursor has copper species and gallium species deposited using a second target device with a second Cu/Ga composition ratio substantially equal to the first Cu/Ga composition ratio. A third precursor comprising indium material overlies the second precursor. The precursor layers are subjected to a thermal reaction with at least selenium species to cause formation of an absorber material comprising sodium species and a copper to indium-gallium atomic ratio of about 0.9.
申请公布号 EP2410556(A2) 申请公布日期 2012.01.25
申请号 EP20110174885 申请日期 2011.07.21
申请人 STION CORPORATION 发明人 SHAO, MAY
分类号 H01L21/02;H01L21/36 主分类号 H01L21/02
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