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发明名称
LITHOGRAPHIC APPARATUS, COMPUTER PROGRAM PRODUCT AND DEVICE MANUFACTURING METHOD.
摘要
申请公布号
NL2006969(A)
申请公布日期
2012.01.24
申请号
NL20112006969
申请日期
2011.06.20
申请人
ASML NETHERLANDS B.V.
发明人
POSTMA, SYTSE;KERKHOF, MARCUS;MOEST, BEARRACH;MATIAS SERRAO, VASCO MIGUEL
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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