REACTOR CLEANING APPARATUS AND REACTOR CLEANING METHOD

摘要

Provided is a technology for reliably removing halogenated silane polymers adhered to the inner wall surface of a reactor, and with which a desired area of the reactor inner wall can be washed in a focused manner. A rotating member (22), which is mounted to the tip of a vertical shaft (21), can rotate centered on an axis (Q). A nozzle support body (23) is able to rotate centered on an axis (P), and when the rotating member (22) rotates, the rotating member (22) revolves around the vertical shaft (21) centered on the axis (Q). When cleaning water is sprayed from a nozzle (24) at high pressure, the nozzle support body (23) rotates centered on the axis (P) due to the spray reaction force, and said rotation is transmitted to the rotating member (22). Consequently, the rotating member (22) rotates at the same time the nozzle support body (23) rotates. As a result, the nozzle support body (23) revolves while rotating around the vertical shaft (21). Due to this self-revolving mechanism, cleaning water that is sprayed from the nozzle (24) at high pressure is sprayed three-dimensionally, thereby cleaning the surface of the inner wall (32) of the reactor (30).