| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wafer charge assistance table capable of reducing an occurrence rate of concave defects in a poly-coated wafer. <P>SOLUTION: A wafer charge assistance table 1, which is used when transporting a vertical boat 10 in which a wafer 20 is set, includes: a support base 2 for supporting the vertical boat 10; a pair of support bars 3A and 3B for supporting two points on an outer circumference of the wafer 20 in the vertical boat 10 laid in a horizontal state on the support base 2 and securing a non-contact state between an end surface of the wafer 20 and a support column of the vertical boat 10; a handle part 4 provided on one end side in a longitudinal direction of the support base 2; and a wheel 5 provided on the other end side in the longitudinal direction of the support base 2. The wafer 20 in the vertical boat 10 set on the wafer charge assistance table 1 is supported at two points of its outer circumferential portion with the pair of support bars 3A and 3B, thereby securing the non-contact state between the end surface of the wafer 20 and a lower support column of the vertical boat 10. <P>COPYRIGHT: (C)2012,JPO&INPIT |
