发明名称 ROTARY TARGET BACKING TUBE BONDING ASSEMBLY
摘要 A rotary sputtering target bonded to a backing tube such that the bonding material is applied only proximate the ends of the rotary sputtering target and is also between the target and the backing tube to form a gap between the rotary sputtering target and the backing tube and a device for bonding a rotary sputtering target to a backing tube.
申请公布号 WO2012009264(A2) 申请公布日期 2012.01.19
申请号 WO2011US43532 申请日期 2011.07.11
申请人 MATERION ADVANCED MATERIALS TECHNOLOGIES AND SERVICES INC.;WITYAK, GEORGE, MICHAEL;COX, LUTHER, WILBURN 发明人 WITYAK, GEORGE, MICHAEL;COX, LUTHER, WILBURN
分类号 C23C14/34 主分类号 C23C14/34
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