| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hard coating having a high hardness and a low friction coefficient, and to provide a simple method for producing the hard coating. <P>SOLUTION: The hard coating is formed from a nitride represented by following formula (1): (W<SB POS="POST">1-x</SB>Al<SB POS="POST">x</SB>)(N<SB POS="POST">y</SB>O<SB POS="POST">1-y</SB>)<SB POS="POST">z</SB>, wherein, 0.18≤x≤0.7, 0.85≤y≤1, and 0.5≤z≤1.2. In the hard coating, the crystal structure is composed of only cubic crystals. The hard coating can be formed by a sputtering method or an ion plating method. <P>COPYRIGHT: (C)2012,JPO&INPIT |
