| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect an electromagnetic wave at high sensitivity by setting electromagnetic wave sensors of different wavelengths on the same semiconductor substrate. <P>SOLUTION: A composite detector includes: a sensing section 20; a charge supply section 16 for supplying charges to the sensing section 20; a charge supply adjustment section ICG2 formed between the sensing section 20 and the charge supply section 16; a charge accumulating section 17 for accumulating charges from the sensing section 20; a charge transfer adjustment section TG1 formed between the sensing section 20 and the charge accumulating section 17; and an output section 21 corresponding to charges in the charge accumulating section 17. A first set and a second set are formed on the same semiconductor substrate. The sensing section 20 of the first set receives a first electromagnetic wave and generates charges corresponding to the intensity of the first electromagnetic wave. An electromagnetic wave sensing element for receiving a second electromagnetic wave of a wavelength different from that of the first electromagnetic wave, and outputting it according to the intensity of the second electromagnetic wave is mounted on a semiconductor substrate corresponding to the second set. The sensing section of the second set changes potential according to the power of the electromagnetic sensing element 130. <P>COPYRIGHT: (C)2012,JPO&INPIT |
