APPARATUS AND METHOD FOR ANALYZING MINUTE SAMPLE

摘要

Disclosed is a mass spectrometry, whereby an organic minute foreign material that causes a failure of a device and the like can be analyzed at high sensitivity in an SEM, said organic minute foreign material being approximately several µm. In an SEM chamber, a heating mechanism for heating the minute sample, and a mass spectrometer for analyzing a vaporized sample are attached. Consequently, without taking out the foreign material observed in the SEM from the vacuum chamber of the SEM, the minute organic foreign material can be analyzed by mass spectrometry. Furthermore, both the inorganic and organic foreign materials can be identified using EDX at the same time, and foreign materials can be analyzed with high throughput.