MICRO-ELECTROMECHANICAL GENERATOR AND ELECTRIC APPARATUS USING SAME

摘要

Disclosed is a highly reliable inductive vibration power generator wherein mechanical damping caused by the phenomenon of electrostatic pulling-together (stiction) and the like is suppressed even if the potential of an electret is increased and/or the gap between an electrode and the electret is reduced in order to increase the amount of power generation. The two surfaces of a vibratable mobile substrate (110) are respectively provided with first electrets (101) and second electrets (103). By means of providing first electrodes (102) and second electrodes (104) to a bottom substrate (111) and a top substrate (109) and facing the respective electrets with a predetermined gap therebetween, electrostatic force is caused to arise on both sides of the mobile substrate (110), and the pulling of the mobile substrate (110) in only one direction is prevented.