IMPROVED CONTRAST FOR SCANNING CONFOCAL ELECTRON MICROSCOPE
摘要
A scanning confocal transmission electron microscope includes a descan deflector and a corrector below the sample. The microscope uses a detector that is preferably significantly larger than the resolution of the microscope and is positioned in the real image plane, which provides improved contrast, particularly for light elements.
申请公布号
WO2012009543(A2)
申请公布日期
2012.01.19
申请号
WO2011US44019
申请日期
2011.07.14
申请人
FEI COMPANY;LAZAR, SORIN;FREITAG, BERT HENNING;TIEMEIJER, PETER CHRISTIAAN
发明人
LAZAR, SORIN;FREITAG, BERT HENNING;TIEMEIJER, PETER CHRISTIAAN