| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray stress measuring apparatus capable of accurately discriminating a diffracted X-ray peak without influence from background fluorescent X-rays, even in the case that X-ray irradiation density to an object to be measured is enhanced. <P>SOLUTION: An X-ray stress measuring apparatus comprises an X-ray irradiating means for irradiating X-rays to a metal sample surface, an X-ray detecting means for detecting diffracted X-rays emitting from the metal sample surface, and a calculating means for calculating a stress of a metal based on a change in wavelength of the diffracted X-rays, where a Ti filter and a Cl compound filter is disposed between the X-ray detecting means and the metal sample surface. Alternatively, a filter containing Ti and a Cl compound may be used. The Ti filter reduces fluorescent X-rays of Fe, and the Cl compound filter reduces fluorescent X-rays of Ti. <P>COPYRIGHT: (C)2012,JPO&INPIT |
