| 摘要 |
<p>A liquid immersion member (3) is disposed inside an immersion exposure apparatus (EX) and at least partly around an optical member (8) and an optical path (K) of exposure light that passes through a liquid (LQ) between the optical member and an object (P). The liquid immersion member comprises: a first member (28), which has a recovery port (18) that recovers at least some of the liquid from the space above the object; a recovery passageway (19), wherethrough the liquid recovered via the recovery port flows; a discharge part (20), which has a first discharge port (21) for discharging the liquid from the recovery passageway and a second discharge port (22) for discharging a gas from the recovery passageway, that separately discharges the liquid and the gas from the recovery passageway; and a hindering part (40), which hinders the liquid in the recovery passageway from contacting the second discharge port.</p> |
