| 摘要 |
A plating method comprising: continuously electroplating a surface of a film having a surface resistivity of from 1 to 1,000&OHgr;/□ in a plurality of times, wherein the plurality of times are equally divided into a former half stage and a latter half stage, and wherein an average plating time of the former half stage of the electroplating step is shorter than an average plating time of the latter half stage of the electroplating step or an average plating voltage at the latter half stage of the electroplating step is 60% or less of an average plating voltage at the former half stage of the electroplating step. |
