| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grinding device uniformly grinding an abrasive cloth, and to provide a grinding method using the grinding device. <P>SOLUTION: In the double-sided polishing apparatus 1, which includes a carrier 3 holding a workpiece W and a pair of upper and lower rotating surface plates 4, 5 opposed to each other with the carrier 3 interposed therebetween and each having, on the facing surfaces of the rotating surface plates 4, 5, the abrasive cloth 6 for polishing the workpiece W, the grinding method for the abrasive cloth 6 includes grinding of the abrasive cloths 6 on the upper and lower rotating surfaces plates 4, 5 by: separating the upper and the lower rotating surface plates 4, 5 from each other; inserting, between the separated upper and lower rotating surface plates, an arm 12 having at a distal end portion 10 thereof a grinding plate 11 smaller in diameter than the rotating surface plates; and pressing the grinding plate 11 against each abrasive cloth 6 and rotating the grinding plate 11, thereby grinding the abrasive cloth 6. The grinding device 9 enables such a grinding method. <P>COPYRIGHT: (C)2011,JPO&INPIT |
