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发明名称
retainer ring structure for chemical-mechanical polishing machine
摘要
申请公布号
KR200458011(Y1)
申请公布日期
2012.01.17
申请号
KR20090007671U
申请日期
2009.06.15
申请人
发明人
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
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