MEHRSCHICHTIGES PIEZOELEKTRISCHES BAUELEMENT

摘要

To provide a monolithic piezoelectric element that can be easily manufactured while the stack is prevented from being mechanically broken by stress. The monolithic piezoelectric element includes a stack 10, and the stack 10 includes a crack-forming conductive layer 13 for forming a small crack therein. The small crack alleviates stress, thereby preventing the occurrence of such a large crack as extends to the piezoelectrically active region.