发明名称 UNIT FOR CONTROLLING VACUUM OF PICKERS AND PICKER APPARATUS HAVING THE UNIT
摘要 PURPOSE: A unit for controlling vacuum of pickers and a picker apparatus having the unit are provided to prevent fail of a braking pressure in a picker when the picker is vacuum-destructed. CONSTITUTION: A vacuum control unit(100) comprises a connecting passageway, a discharge passageway, a vacuum provider(130), a supply passageway(140), a control valve(150), a pressure controller(160), and an air tank(170). The connecting passageway is connected to a plurality of plurality of pickers. The discharge passageway is connected to the connecting passageway and discharge air inside a picker to form vacuum in the picker. The supply passageway supplies air to the picker through the connecting passageway to destruct the vacuum of the picker. A control valve selectively connects the connecting passageway to a discharge passageway or a supply passageway.
申请公布号 KR20120004800(A) 申请公布日期 2012.01.13
申请号 KR20100065480 申请日期 2010.07.07
申请人 SECRON CO., LTD. 发明人 PARK, CHANG EOK;LEE, JAE DONG
分类号 G01R31/26;G05D16/16;H01L21/66 主分类号 G01R31/26
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