METHOD FOR MACHINING WORKPIECE, METHOD FOR DIVIDING WORKPIECE AND LASER MACHINING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for machining a workpiece to be divided, preventing a machining trace from being formed and forming a starting point for more unfailingly dividing a workpiece.

SOLUTION: The machining method for forming a starting point on the workpiece includes: the placing step for placing the workpiece on a stage; the liquid layer forming step for forming a liquid layer on the surface to be machined of the workpiece placed on the stage by using a liquid transparent to a pulse laser beam used for machining the workpiece; and the irradiation step for irradiating the workpiece with the pulse laser beam while allowing the pulse laser beam to pass through the liquid layer so that regions to be irradiated per unit pulse beam are discretely formed on the surface to be machined to sequentially form cleavage or parting of the workpiece between the regions to be irradiated, thereby forming the starting point for dividing on the workpiece.

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