| 摘要 |
<P>PROBLEM TO BE SOLVED: To more surely prevent a semi-translucent film from being etched. <P>SOLUTION: A light shielding part is formed by laminating the semi-translucent film, an etching stopper film, and a light shielding film in this order on a transparent substrate, and a semi-translucent part is formed by forming the semi-translucent film on the transparent substrate, and a translucent part is formed by exposing the transparent substrate, and the etching stopper film has a film thickness being 1.5 or more times as thick as a surface roughness of the semi-translucent film. <P>COPYRIGHT: (C)2012,JPO&INPIT |
