| 摘要 |
PURPOSE: A contactless transfer system which uses a magnet in different regions is provided to arrange a corresponding position of a driven magnet and driving magnet in an asymmetric way, thereby preventing a backlash phenomenon which is able to be generated between the magnets in operation. CONSTITUTION: A transfer stage(111) which is transferred in a z-direction is arranged in a vacuum chamber(110). A guide slot(112a) is arranged in a lower end part in both sides of the transfer stage. The guide slot is comprised in order to be transferred by a rail(113a). A first driving magnet(119) is installed in a corresponding position by facing a first driven magnet(117). A second driving magnet(120) is installed in a corresponding position by facing a second driven magnet(118).
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