发明名称 ATMOSPHERIC PRESSURE PLASMA APPARATUS
摘要 The present invention relates to an atmospheric pressure plasma apparatus, including an arc-jet plasma reaction unit which arc-discharges and drains a reaction gas inflowing together with a first carrier gas, and an atmospheric pressure plasma reaction unit which ionizes the drained reaction gas at atmospheric pressure to easily generate plasma in the atmospheric pressure plasma reaction unit.
申请公布号 WO2011139036(A3) 申请公布日期 2012.01.12
申请号 WO2011KR02933 申请日期 2011.04.22
申请人 SE PLASMA INC.;LEE, SANG RO;IM, SEONG SIL;KIM, YUN HWAN;YIM, CHAN JOO 发明人 LEE, SANG RO;IM, SEONG SIL;KIM, YUN HWAN;YIM, CHAN JOO
分类号 H05H1/24;C23C16/50;H01L21/3065 主分类号 H05H1/24
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