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经营范围
发明名称
Plazma cleaning apparatus for a semiconductor panel
摘要
申请公布号
KR101104924(B1)
申请公布日期
2012.01.12
申请号
KR20100037235
申请日期
2010.04.22
申请人
发明人
分类号
H01L21/302;H01L23/48
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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