| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a discharge excitation-type pulse oscillation gas laser apparatus enabling further highly repeating operation equal to or more than 4 kHz and use in long term by suppressing increase of a required gas flow rate and increase of supply power to a fan. <P>SOLUTION: In the discharge excitation-type pulse oscillation gas laser apparatus, discharge surface shapes of an anode and a cathode in slender shapes are convex curve shapes in a cross section perpendicular to the longitudinal direction of the electrodes. A width We of the electrode at a ground potential and a minimum distance g between the discharge electrodes satisfy the relation of g/We>3. A power supply supplying power with density equal to or more than 50 mJ/cm<SP POS="POST">3</SP>to the discharge electrodes at a pulse repetition number equal to or more than 4 kHz is provided. The convex curve shape of the discharge surface is any one of the shapes which are oval, hyperbolic, and a higher order function expressed by x<SP POS="POST">N</SP>/(We/2)<SP POS="POST">N</SP>+y<SP POS="POST">N</SP>/h<SP POS="POST">N</SP>=1, where h is an electrode curve part height, x is a coordinate at a position in the electrode width direction, y is a coordinate in the electrode convex direction, and N is an integer equal to or greater than 3. A ratio ΔE/Eave is equal to or less than 35%, where ΔE=difference of electric field intensities, and Eave=electric field intensity average value, within the electrode width. <P>COPYRIGHT: (C)2012,JPO&INPIT |
