| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a DLC coating film capable of providing a sliding member exerting a reduced coefficient of friction at sliding in the presence of a lubricant compared to a conventional one, and a method for forming the same. <P>SOLUTION: The DLC coating film is applied to the sliding surface of the sliding member in which the DLC coating film has a surface energy of 52-74 mJ/m<SP POS="POST">2</SP>, or a contact angle of ethylene glycol is 27-51°. The DLC coating film shows a graphite crystal peak in an X-ray scattering spectrum. The method for forming the DLC coating film comprises steps for subjecting the previously-formed DLC coating film to plasma treatment, thereby controlling the surface energy and forming the DLC coating film. In the plasma treatment, the DLC coating film is irradiated with plasma with an adjusted amount of ions of 1.30×10<SP POS="POST">16</SP>to 1.85×10<SP POS="POST">17</SP>ions/cm<SP POS="POST">2</SP>at a bias (ion acceleration) voltage of 80-140 V. <P>COPYRIGHT: (C)2012,JPO&INPIT |
