METHOD AND APPARATUS FOR FORMING SELECTIVE EMITTER OF SOLAR CELL

摘要

PURPOSE: A selective emitter formation method of a solar battery and an apparatus thereof are provided to selectively perform a second emitter layer formation process when a substrate is fixed on a table, thereby stably performing a selective emitter formation process by eliminating vibration generating factors of the substrate. CONSTITUTION: A transfer device transfers a substrate in which a first emitter layer is arranged. A table supports the substrate which is provided through the transfer device. A preheating device preheats the substrate supported on the table. A laser irradiation device projects a laser(L) beam to a predetermined position of the substrate supported on the table. The laser irradiation device includes a first laser irradiation device(400a) which is able to move in a first direction and a second laser irradiation device(400b) which is able to move in a second direction.