METHOD FOR DETECTING A LEAK OF RESONANCE COMPONENT

摘要

PURPOSE: A leak detection method of a resonance device is provided to reduce costs and installation space because multiple inspection devices are not required. CONSTITUTION: A leak detection method of a resonance device is as follows. One or more resonance devices are put into a container(715). The container is filled with brine liquid(716). The container is loaded inside a decompression chamber(710) and is decompressed. The resonance devices are washed and dried, and the impedance of the resonance devices is measured. It is determined whether the resonance devices have a leak or not according to the measured impedance.