发明名称 |
System, method and apparatus for fabricating a c-aperture or E-antenna plasmonic near field source for thermal assisted recording applications |
摘要 |
A method of fabricating a c-aperture or E-antenna plasmonic near field source for thermal assisted recording applications in hard disk drives is disclosed. A c-aperture or E-antenna is built for recording head applications. The technique employs e-beam lithography, partial reactive ion etching and metal refill to build the c-apertures. This process strategy has the advantage over other techniques in the self-alignment of the c-aperture notch to the c-aperture internal diameter, the small number of process steps required, and the precise and consistent shape of the c-aperture notch itself. |
申请公布号 |
US8092704(B2) |
申请公布日期 |
2012.01.10 |
申请号 |
US20080345715 |
申请日期 |
2008.12.30 |
申请人 |
BALAMANE HAMID;BOONE, JR. THOMAS DUDLEY;KATINE JORDAN ASHER;STIPE BARRY CUSHING;HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. |
发明人 |
BALAMANE HAMID;BOONE, JR. THOMAS DUDLEY;KATINE JORDAN ASHER;STIPE BARRY CUSHING |
分类号 |
B44C1/22;B23P15/00 |
主分类号 |
B44C1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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