| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wavelength variable filter having superior optical characteristics without causing an increase in driving voltage. <P>SOLUTION: A second substrate 3 has two surfaces which have different positions in a thickness direction at a side of a movable part 21, a driving electrode 33 is provided on one of the two surfaces, and a detecting electrode 40 is provided on the other of the two surfaces. Electrostatic attractive force is generated between the driving electrode 33 and the movable part 21 by generating a potential difference therebetween based on capacitance between the detecting electrode 40 and the movable part 21, thereby displacing the movable part 21. Light reflections are repeated between a fixed reflection film 35 and a movable reflection film 25 to produce interference, whereby light having a wavelength corresponding to a distance between the fixed reflection film 35 and the movable reflection film 25 is emitted to the outside. <P>COPYRIGHT: (C)2012,JPO&INPIT |
