Transport roller for transportation of plate-shaped substrate in substrate treatment plant, has radiation protection arranged at roller end, and plate-shaped diaphragms transversely aligned to rotational axis of roller

摘要

#CMT# #/CMT# The roller has a radiation protection arranged at a roller end (25). Plate-shaped diaphragms (72) are transversely aligned to a rotational axis of the roller. The two diaphragms are arranged parallel to each other at a distance. A spacer is arranged between the two adjacent diaphragms. The diaphragms are attached on a cuff (71) or clip. The roller end is attached with a bearing pin (26). An end cap (2) is formed with a bore (21). A rotationally symmetric roller body (1) is made of a ceramic material. The end cap is made of stainless steel. #CMT# : #/CMT# The diaphragm is made of stainless steel and ceramic material. #CMT#USE : #/CMT# Transport roller for transportation of a plate-shaped substrate in a substrate treatment plant. #CMT#ADVANTAGE : #/CMT# The diaphragm is releasably fixed at the roller, thus simplifying the replacement or cleaning of the diaphragm, while removing the roller from the chamber in a simple and fast manner. The two diaphragms are arranged parallel to each other at the distance, thus enhancing the shield effect. The spacer is arranged between the two adjacent diaphragms, thus maintaining and preventing spacing between the adjacent diaphragms. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a side view and sectional view of a transport roller. 1 : Rotationally symmetric roller body 2 : End cap 21 : Bore 25 : Roller end 26 : Bearing pin 71 : Cuff 72 : Plate-shaped diaphragms.