| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress breakage of thin film glass because of pressure change in transferring the thin film glass under near vacuum conditions. <P>SOLUTION: A method of transferring thin film glass G includes a pressure reduction step in which the pressure in a vacuum container 10 is controlled and a transferring step in which the long thin film glass G is transferred in the vacuum container 10 whose pressure is reduced to a near vacuum. In the pressure reduction step, the pressure in the vacuum container 10 is reduced to 10,000 Pa over a period of at least 3 minutes in a state where the thin film glass G in a roll shape is disposed in the vacuum container 10 and thereafter, the pressure is lowered to a near vacuum. <P>COPYRIGHT: (C)2012,JPO&INPIT |
