| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chemical or physical sensor which does not require a protective film, which has a degree of freedom in a detected body and its installation position, and in which a detection accuracy and a sensed distance are less deteriorated than ever before even if a battery-less sensor system is configured in a wireless manner. <P>SOLUTION: The chemical or physical sensor has: a piezoelectric body substrate 3; a pair of input and output terminals 4 and 5 formed on the piezoelectric body substrate 3; a pair of interdigital electrodes 1, connected to the input and output terminals 4 and 5, for exciting a surface acoustic wave; and a detected body 2 connected in parallel to the pair of interdigital electrodes 1 by electrical wires 12. In the chemical or physical sensor, electrical signals are inputted to the input and output terminals 4 and 5 and a change in the electrical signals reflected and output from the input and output terminals 4 and 5 are detected, by which a change is detected in impedance of the input and output terminals 4 and 5 caused by a chemical change or a physical change of the detected body 2, and the change of the detected body 2 is detected. <P>COPYRIGHT: (C)2012,JPO&INPIT |
