发明名称 |
MICROSCOPICALLY STRUCTURED POLYMER MONOLITHS AND FABRICATION METHODS |
摘要 |
Novel polymer monolith structures and methods for fabrication of the same are disclosed in a variety of embodiments. In an illustrative embodiment, a method includes forming a pattern of features on a wafer, thereby forming a patterned wafer; forming a polymer layer on the patterned wafer; using a first plasma to remove at least a portion of the polymer layer; and using a second plasma to etch off at least a portion of the pattern of features, thereby providing a structured polymer monolith. The pattern of features may include an array of pillars. Providing the structured polymer monolith may include providing a structured polymer monolith filter having an array of channels formed by the pillars. The structured polymer monolith may be composed of polypropylene. |
申请公布号 |
WO2011142788(A9) |
申请公布日期 |
2012.01.05 |
申请号 |
WO2010US62625 |
申请日期 |
2010.12.31 |
申请人 |
CORNELL UNIVERSITY;HINESTROZA, JUAN, P.;ZHU, HUANING |
发明人 |
HINESTROZA, JUAN, P.;ZHU, HUANING |
分类号 |
B01D67/00;B01D39/14;B01D69/02;C08J5/18 |
主分类号 |
B01D67/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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