发明名称 |
MEMS probe fabrication on a reusable substrate for probe card application |
摘要 |
A Micro-Electro-Mechanical-Systems (MEMS) probe is fabricated on a substrate for use in a probe card. The probe has a bonding surface to be attached to an application platform of the probe card. The bonding surface is formed on a plane perpendicular to a surface of the substrate. An undercut is formed beneath the probe for detachment of the probe from the substrate. |
申请公布号 |
US8089294(B2) |
申请公布日期 |
2012.01.03 |
申请号 |
US20080186458 |
申请日期 |
2008.08.05 |
申请人 |
HSU TSENG-YANG;LAM CAO NGOC;WINMENS TECHNOLOGIES CO., LTD. |
发明人 |
HSU TSENG-YANG;LAM CAO NGOC |
分类号 |
G01R31/26 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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