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发明名称
矽单晶之制造方法,及矽晶圆之制造方法
摘要
申请公布号
TWI355431
申请公布日期
2012.01.01
申请号
TW096131700
申请日期
2007.08.27
申请人
上睦可股份有限公司
发明人
稻见修一;井上邦春;诸石学;深川嗣也;草场伸博
分类号
C30B15/36
主分类号
C30B15/36
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
日本
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