发明名称 |
CAPACITANCE TYPE MEMS MICROPHONES USING ZEOLITE MEMBRANE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PURPOSE: A capacitance type mems microphones using zeolite membrane and method for manufacturing the same are provided to easily adjust sensitivity by having a porous structure. CONSTITUTION: In a capacitance type mems microphones using zeolite membrane and method for manufacturing the same, a penetration hole(H) is formed in a substrate(100). A zeolite vibration plate(110) is formed on the substrate. The zeolite vibration plate covers the penetration hole. A bottom electrode(120) is formed in the silver zeolite vibration plate. An upper electrode(130) has a plurality of air injection holes(131). |
申请公布号 |
KR20110139853(A) |
申请公布日期 |
2011.12.30 |
申请号 |
KR20100059924 |
申请日期 |
2010.06.24 |
申请人 |
KOREA ADVANCED NANO FAB CENTER |
发明人 |
KIM, SHIN KEUN;SUNG, HO KUN;KO, CHUL GI |
分类号 |
H04R19/04;H04R31/00 |
主分类号 |
H04R19/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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