MASTER OSCILLATOR-POWER AMPLIFIER DRIVE LASER WITH PRE-PULSE FOR EUV LIGHT SOURCE

摘要

A device is described herein which may comprise an optical amplifier having a gain band including wavelengthsλ1 andλ2, withλ1≠λ2; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelengthλ1; a main pulse seed laser generating a laser output having wavelength,λ2; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.