PROCESS FOR PRODUCTION OF REPLICA MOLD FOR IMPRINTING USE

摘要

Disclosed is a process for producing a replica mold for imprinting use which is inexpensive and has good properties including strength and flexibility. The process for producing a replica mold comprises the following steps: (A) applying an organic-inorganic composite material onto a base; (B) partially curing the coated surface with heat and/or an electromagnetic beam to produce a base on which a fine concave-convex pattern is to be formed; (C) pressing a master mold having a predetermined fine concave-convex pattern formed thereon against the base by an imprinting technique to transfer the fine concave-convex pattern onto the base; and (D) irradiating the base, onto which the pattern has been transferred, with an electromagnetic beam to cure the composite material on the base.