发明名称 METHOD FOR FORMING A CATALYST SUITABLE FOR GROWTH OF CARBON NANOTUBES
摘要 The present disclosure is related to a method for forming a catalyst nanoparticle on a metal surface, the nanoparticle being suitable for growing a single nanostructure, in particular a carbon nanotube, the method comprising at least the steps of: providing a substrate, having a metal layer on at least a portion of the substrate surface, depositing a sacrificial layer at least on the metal layer, producing a small hole in the sacrificial layer, thereby exposing the metal layer, providing a single catalyst nanoparticle into the hole, removing the sacrificial layer. The disclosure is further related to growing a carbon nanotube from the catalyst nanoparticle.
申请公布号 US2011315951(A1) 申请公布日期 2011.12.29
申请号 US201113096310 申请日期 2011.04.28
申请人 SRIRAMAN HARI PATHANGI;WITVROUW ANN;VEREECKEN PHILIPPE M.;KATHOLIEKE UNIVERSITEIT LEVEN, K.U.LEUVEN R&D;IMEC 发明人 SRIRAMAN HARI PATHANGI;WITVROUW ANN;VEREECKEN PHILIPPE M.
分类号 H01L29/66;B05D5/12;B82Y30/00;B82Y40/00;C25D15/00;H01L21/20 主分类号 H01L29/66
代理机构 代理人
主权项
地址