发明名称 |
Method, Apparatus, and System for Micromechanical Gas Chemical Sensing Capacitor |
摘要 |
A method for fabrication of capacitive environment sensors is provided in which the sensor elements are integrated in a CMOS structure with electronics through the use of complementary metal oxide semiconductor (CMOS) fabrication methods. Also provided are environment sensors fabricated, for example, by the method, and a measurement system using the environment sensors fabricated by the method. The described method includes etching away one of the metal layers in a CMOS chip to create a cavity. This cavity is then filled with an environment-sensitive dielectric material to form a sensing capacitor between plates formed by the metal adhesion layers or an array of contacts from other metal layers of the CMOS structure. This approach provides improved sensing capabilities in a system that is easily manufactured. |
申请公布号 |
US2011316054(A1) |
申请公布日期 |
2011.12.29 |
申请号 |
US201113152450 |
申请日期 |
2011.06.03 |
申请人 |
FEDDER GARY;LAZARUS NATHAN;CARNEGIE MELLON UNIVERSITY |
发明人 |
FEDDER GARY;LAZARUS NATHAN |
分类号 |
H01L27/092;H01L21/02 |
主分类号 |
H01L27/092 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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